Look to EpiTek for all of your MOCVD system replacement parts. We sell sell the parts needed to refurbish and/or upgrade your vintage Veeco, Aixtron, or other manufacturers’ metal organic chemical vapor deposition (MOCVD) or chemical vapor deposition (CVD) instruments.

Contact us to learn more about our consumable and non-consumable parts at costs significantly below OEM prices.

We provide replacement parts for the following manufacturers:

  1. Veeco instruments
  2. Aixtron tools
  3. Other manufacturers’ MOCVD systems
  4. Custom designed and machined parts


Our parts include, but are not limited to:

  • Heater assemblies and ceramic standoffs
  • Tall or short jar chamber parts
  • Spindles
  • Spindle motors
  • Throttle valves
  • Particle filters
  • Power supplies
  • Control computers
  • Nuts, bolts, screws
  • General wiring

Epitek engineers can also install and service your vintage MOCVD and CVD tools. Additionally, our Epitek engineers can provide annual or quarterly preventative maintenance or offer production support to keep your tool running smoothly and to reduce or prevent downtime.