Aixtron MOCVD Parts

Epitek provides replacement parts for your vintage Aixtron metal organic chemical vapor deposition (MOCVD) tools. We upgrade, service, and sell parts for the following Aixtron tools:

  • 2000 Series
  • 2400 Series
  • 2600 Series
  • Miscellaneous parts

Contact our sales department for a quote: sales@mocvdtechnology.com or call 1-800-651-2591.