Veeco MOCVD Instrument Parts

Epitek sells replacement parts for your vintage Veeco metal organic chemical vapor deposition (MOCVD) tools. We upgrade, service, and sell parts for the following Veeco instruments:

  • Veeco D-125
  • Veeco D-180 GaN (Gallium Nitride)
  • Veeco D-180 GaAs (Gallium Arsenide)
  • Veeco E300 GaN (Gallium Nitride)
  • Veeco E300 GaAs (Gallium Arsenide)
  • Veeco E400
  • Veeco E450

Contact us today for a quote: or at 1-800-651-2591.