Preventative Maintenance Plans

Preventative maintenance (PM) is critical for preventing particle issues that result in diminished device quality. EpiTek offers both annual and quarterly PM plans. Consider one of the following plans below.

Quarterly PM- Large Tool

  • Large Production Tool
  • 1 Visit per Quarter (4 Total)
  • 2 Days On-site per Visit
  • Change Particle Filters
  • Clean Chamber

Quarterly PM- Small Tool

  • Small Production Tool
  • 1 Visit per Quarter (4 Total)
  • 1 Day On-site per Visit
  • Change Particle Filter
  • Clean Chamber

Annual PM- Large Tool

  • Large Production Tool
  • 1 Annual Visit
  • Up to 5 Days On-site
  • Disassemble Chamber & Exhaust
  • Clean Chamber & Exhaust
  • Replace Exhaust Seals
  • Reassemble Chamber & Exhaust

Annual PM- Small Tool

  • Small Production Tool
  • 1 Annual Visit
  • 2 Days On-site
  • Disassemble Chamber & Exhaust
  • Clean Chamber & Exhaust
  • Replace Exhaust Seals
  • Reassemble Chamber & Exhaust