Maintenance Plans

EpiTek offers a variety of maintenance plans. Please see tables below for details.

Quarterly PM- Large Tool

  • Large Production Tool
  • 1 Visit per Quarter (4 Total)
  • 2 Days On-site per Visit
  • Change Particle Filters
  • Clean Chamber

Quarterly PM- Small Tool

  • Small Production Tool
  • 1 Visit per Quarter (4 Total)
  • 1 Day On-site per Visit
  • Change Particle Filter
  • Clean Chamber

Annual PM- Large Tool

  • Large Production Tool
  • 1 Annual Visit
  • Up to 5 Days On-site
  • Disassemble Chamber & Exhaust
  • Clean Chamber & Exhaust
  • Replace Exhaust Seals
  • Reassemble Chamber & Exhaust

Annual PM- Small Tool

  • Small Production Tool
  • 1 Annual Visit
  • 2 Days On-site
  • Disassemble Chamber & Exhaust
  • Clean Chamber & Exhaust
  • Replace Exhaust Seals
  • Reassemble Chamber & Exhaust